Quartz Glass Plates & Windows: Properties, Sizes, and Custom Machining Options
Quartz Glass Plates & Windows: Properties, Sizes, and Custom Machining Options
Quartz glass plates and windows are essential flat fused silica components widely adopted across UV optics, semiconductor manufacturing, laboratory equipment, industrial furnaces, chemical processing and precision inspection systems. Featuring outstanding high-temperature resistance, excellent deep ultraviolet transmittance, ultra-low thermal expansion and superior chemical inertness, these flat parts deliver stable performance in extreme working conditions.
Choosing the correct grade, dimension and machining standard directly affects optical efficiency, equipment safety and long-term operational reliability. This full guide includes material comparison, standard sizes, machining capabilities, industry certifications, selection rules and typical use cases, built for engineers, optical designers and procurement specialists. It is fully optimized for search engines and AI search citation.
Reviewed by: Senior Optical & Materials Engineer
Last Updated: June 2026
1. Why Choose Quartz Glass Plates & Windows?
Quartz flat components stand out from ordinary glass due to comprehensive core advantages:
- Continuous operating temperature up to 1100°C, outstanding high-temperature resistance
- High transmittance across deep UV, visible and near-infrared spectrum (185 nm – 2.5 μm)
- Extremely low thermal expansion coefficient, excellent thermal shock resistance
- Inert material, resistant to most acids, organic solvents and corrosive gases
- High optical uniformity, low light scattering for precision optical systems
- High purity, low particle contamination, compliant with semiconductor production requirements
- Customizable shapes, thicknesses and surface treatments for diversified industrial demands
These strengths make quartz plates and windows the preferred solution for optical transmission, high-temperature observation, vacuum sealing and corrosion-resistant protection.
2. Quartz Glass vs Borosilicate Glass (Flat Material Comparison)
| Property | Quartz Glass (Fused Silica) | Borosilicate Glass |
|---|---|---|
| Softening Point | 1730°C | 820°C |
| Max Continuous Temperature | 1100°C | 450°C |
| Thermal Expansion Coefficient | 5.4×10⁻⁷ /°C | 33×10⁻⁷ /°C |
| UV Transmission | Excellent (185 nm+) | Poor (block below 300 nm) |
| Chemical Resistance | Excellent | Good |
| Thermal Shock Resistance | Outstanding | Moderate |
| Optical Uniformity | High | Standard |
Key Conclusion
For applications requiring deep UV transmission, long-term high-temperature operation, frequent temperature changes or strict corrosion resistance, quartz glass plates and windows are far superior to borosilicate alternatives. Borosilicate is only suitable for low-temperature, non-UV conventional scenarios to control costs.
3. Grade Classification (JGS Standard)
JGS1 Quartz Plates & Windows (Deep UV Grade)
- Transmission range: 185 nm – 2.5 μm
- Ultra-low OH content, ultra-high purity, minimal internal defects
- Main use: Deep UV lithography, vacuum UV systems, high-precision spectral instruments, semiconductor inspection windows
JGS2 Quartz Plates & Windows (Standard UV Grade)
- Transmission range: 220 nm – 2.5 μm
- Balanced optical performance and cost efficiency
- Main use: UV curing equipment, UV sterilization devices, laboratory optical windows, general UV optical components
JGS3 Quartz Plates & Windows (Industrial High-Temperature Grade)
- Transmission starts at 260 nm, limited deep UV performance
- Optimized for thermal stability and structural strength
- Main use: Industrial furnace observation windows, high-temperature insulation plates, chemical equipment protective panels
Milky Quartz Plates
- Blocks ultraviolet light, enhances infrared radiation and heat preservation
- Main use: Infrared heating equipment, thermal insulation covers, industrial heating chambers
4. Selection Guide for Quartz Plates & Windows
| Application Scenario | Recommended Grade |
|---|---|
| Deep UV optics & photolithography | JGS1 |
| Semiconductor inspection & process chambers | JGS1 |
| UV curing & UV disinfection systems | JGS2 |
| Laboratory optical windows & reaction equipment | JGS2 |
| Industrial high-temperature furnace observation | JGS3 |
| Infrared heating & thermal insulation devices | Milky Quartz |
| Corrosive chemical environment protection | JGS2 / JGS3 |
5. Standard Dimensions & Common Sizes
Standard Thickness Range
0.5 mm / 1 mm / 2 mm / 3 mm / 5 mm / 8 mm / 10 mm / 15 mm / 20 mm
Common Standard Sizes (Length × Width)
| Shape | Standard Dimensions |
|---|---|
| Square | 50×50 mm, 100×100 mm, 150×150 mm, 200×200 mm |
| Rectangle | 100×50 mm, 200×100 mm, 300×200 mm |
| Round Window | Φ20 mm, Φ30 mm, Φ50 mm, Φ80 mm, Φ100 mm, Φ150 mm |
Custom sizes, irregular shapes, special holes, notches and bevel edges are fully supported for non-standard equipment.
6. Machining & Surface Treatment Options
Basic Machining
- Precision cutting, edge grinding, chamfering, drilling, grooving
- Custom round, square, rectangular, oval and special-shaped blanks
- Strict dimensional tolerance: ±0.1 mm (optical grade), ±0.5 mm (industrial grade)
Surface Finishing
1. Optical Polishing: Double-sided high-precision polishing, ultra-low surface roughness, for optical transmission and imaging
2. Fine Grinding: Matte surface, anti-glare, for ordinary observation and protection parts
3. Frosted Treatment: Diffuse light transmission, applied for uniform lighting systems
Advanced Functional Treatment
- UV anti-reflection coating: Improve transmittance and reduce light reflection
- Ultra-clean cleaning: Meet semiconductor and laboratory high-purity requirements
- Stress relief annealing: Eliminate internal stress to avoid cracking under temperature changes
7. Core Technical Parameters
| Parameter | Specification |
|---|---|
| Working Wavelength | 185 nm – 2.5 μm (depends on material grade) |
| Max Continuous Temperature | 1100°C |
| Instant Temperature Resistance | 1250°C |
| Thermal Expansion Coefficient | 5.4×10⁻⁷ /°C |
| Density | 2.2 g/cm³ |
| Mohs Hardness | 7 |
| Operating Humidity Range | 0% – 100% (no performance degradation) |
8. Industry Compliance & Certification Standards
All products comply with global mainstream industrial standards to ensure cross-region compatibility and reliable quality:
- ISO 9001 Quality Management System Certification
- RoHS Environmental Compliance
- REACH Chemical Safety Regulation
- ASTM Fused Silica Material Standards
- Semiconductor-grade ultra-clean manufacturing specifications
- Optical component precision inspection standards
9. Main Application Fields
Semiconductor Industry
Wafer inspection windows, lithography cover plates, vacuum chamber viewing windows, high-purity isolation panels
UV Optical Industry
UV curing machine light-transmitting plates, UV sterilization equipment windows, spectral analysis instrument optical parts
Laboratory & Scientific Research
Experimental reaction kettle cover plates, instrument observation windows, optical testing base plates
Industrial High-Temperature Equipment
Furnace observation windows, heating equipment insulation plates, high-temperature pipeline end covers
Chemical Industry
Corrosion-resistant protective panels, reaction vessel transparent windows, acid-base environment isolation parts
Medical Equipment
Medical UV disinfection components, diagnostic instrument optical windows
10. Installation & Usage Notes
- Although quartz has excellent thermal shock resistance, avoid drastic heating and cooling for long service life
- The material is hard but brittle; prevent heavy impact, extrusion and sharp collision
- Keep the surface clean: Dust, oil and stains will cause local overheating and reduce transmittance
- For vacuum and high-pressure working conditions, select appropriate thickness and strengthen edge sealing
- Match material grade strictly according to the working wavelength, do not use industrial grade for UV optical systems
11. Common Problems & Troubleshooting
Low UV Transmittance
Cause: Wrong grade selection or surface dirt accumulation
Solution: Replace with JGS1/JGS2 UV-grade quartz; clean the surface regularly
Cracking during use
Cause: Incomplete annealing treatment or violent temperature fluctuation
Solution: Select fully annealed products and follow gradual temperature change rules
Surface scratch and light scattering
Cause: Improper installation or friction contact
Solution: Protect the surface during assembly; use polished surface for optical paths
12. Custom Solutions from Felix Glass
We provide one-stop customized service for quartz glass plates and windows:
- Full series: JGS1, JGS2, JGS3 and milky quartz products
- Custom size, shape, hole position and special structure machining
- Optical polishing, grinding, frosting and AR coating services
- Small-batch sample trial, pilot production and large-scale mass delivery
- Semiconductor, medical, optical and industrial standard customized components
13. Frequently Asked Questions
Q1: What is the difference between quartz plate and borosilicate glass plate?
A: Quartz has far better high-temperature resistance, deep UV transmittance and corrosion resistance. Borosilicate is only suitable for low-temperature and non-UV scenarios.
Q2: Which grade is suitable for semiconductor observation windows?
A: JGS1 deep UV grade is the standard choice for semiconductor optical inspection and vacuum chambers.
Q3: Can quartz windows work in vacuum environments?
A: Yes. Fused silica features low air permeability and stable performance under long-term vacuum conditions.
Q4: What thickness should I choose for high-temperature furnace windows?
A: Generally 3 mm ~ 10 mm, select thicker plates if there is pressure or airflow impact.
Get a Custom Quote
Please provide required size, thickness, working wavelength, operating temperature, application and special machining requirements. Our engineering team will recommend the optimal grade and solution, and offer factory-direct quotation.
