Product Overview Felix Glass is a professional custom quartz wafer manufacturer and OEM optical quartz fabrication supplier, supplying semiconductor grade precision optical quartz components for photolithography equipment manufacturers, MEMS R&D labs and mask production factories globally. Our quartz wafers are fabricated from 99.99% high purity fused silica with JGS1/JGS2/JGS3 material grades, available in single-side polished (SSP) and double-side polished (DSP) finishes. Featuring ultra-low CTE, low TTV, excellent deep UV transmission and low outgassing performance, these precision wafer substrates are core carriers for photomasks, semiconductor lithography, micro-electromechanical systems and UV inspection equipment.We support full custom diameter, ultra-thin thickness, edge chamfer and AR coating processing, fully compliant with semiconductor industrial standards and ISO 9001 quality inspection, covering lab prototype sampling to large-scale OEM mass production.
Product Specifications
| Parameter | Specification |
|---|---|
| Material | 99.99% High‑Purity Fused Silica (JGS1/JGS2/JGS3) |
| Standard Diameter | 2”, 3”, 4”, 6”, 8”, 12”, custom sizes available |
| Thickness | 0.1mm–6.35mm ultra-thin customizable |
| Surface Polish | SSP Single Side Polished / DSP Double Side Polished |
| Surface Quality | 60/40, 40/20, 20/10 MIL optical finish |
| Flatness | λ/2, λ/4, λ/10 @632.8nm |
| Transmission Range | 185nm–3500nm deep UV to infrared |
| Operating Temperature | Up to 1100°C continuous working |
| CTE | 5.5×10⁻⁷ /°C ultra-low thermal expansion |
| TTV | ≤3μm ultra-low total thickness variation |
| Tolerance | Diameter ±0.05mm, thickness ±0.02mm |
| Customization | Edge chamfer, AR coating, marking, special profiling |
Key Features
Manufacturing Capabilities
1. Full‑Axis CNC Machining for complex outlines & holes2. Precision Edge Grinding & Safety Chamfer Processing3. Single & Double Sided Ultra‑Fine Optical Polishing4. High‑Temperature Tempering & Stress Relief Treatment5. Magnetron Sputtering Multi‑Layer Optical Coating6. Complete Optical Performance Lab Inspection
Available Material Grades
Main Application Industries
Custom Manufacturing Service
Why Choose Felix Glass
Frequently Asked Questions
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1. Q: What is the MOQ for custom quartz wafers?A: Ultra-low MOQ support, single prototype wafers can be supplied for lab mask research without mass batch limits.2. Q: Can you produce quartz wafers according to customer CAD specifications?A: Our semiconductor optical team accepts 2D/3D CAD drawings, offers free technical evaluation and 24-hour formal quotation.3. Q: What is the difference between DSP and SSP polished quartz wafers?A: DSP double-side polished for high-precision photomasks; SSP single-side polished for cost-effective general MEMS substrates.4. Which grade quartz wafer is suitable for deep UV photolithography?A: JGS1 deep UV grade is the standard material for 193nm/248nm lithography mask wafers.5. Q: Are quartz wafers suitable for high vacuum semiconductor production lines?A: Ultra-high purity fused silica delivers extremely low outgassing, fully compliant with wafer fabrication vacuum environments.6. Q: What is the minimum customizable thickness of quartz wafer?A: Minimum thickness reaches 0.1mm with stress-free polishing to avoid warpage.7. Q: What is the maximum continuous working temperature of quartz wafer?A: Stable long-term operation at 1100°C, resistant to rapid thermal cycling.8. Q: Can AR anti-reflection coating be applied on quartz wafer surfaces?A: Single or double-sided AR coating is available to maximize UV light transmittance.9. Q: What TTV flatness standard can your quartz wafers reach?A: Ultra-precision TTV ≤3μm to meet strict semiconductor lithography accuracy requirements.10. Q: What standard wafer diameters do you have in stock?A: 2/3/4/6/8/12-inch standard sizes, custom special diameters are available upon request.
Upload technical drawings | Professional engineering support | 24-hour quick response
- What is your MOQ for custom optical glass and display glass parts?
Felix Glass offers highly flexible MOQ to support client projects, including prototype testing, small batch trial orders and large-volume mass production. All products can be fully customized according to your drawings, tolerances and application standards. Send us your specs to get an accurate price quote within 24 hours.
- Can I get free glass samples for testing before bulk order?
Yes, our FELIX GLASS factory supports sample testing for a wide range of precision optical glass components and assemblies. The lead time for sample production is 3 to 7 working days. Please contact us today to arrange samples and obtain a customized solution that meets your needs.
- What is the production lead time for custom optical glass components?
What is the production lead time for custom optical glass components?
Answer: The lead time for standard samples is 3–7 business days, while mass production takes 15–25 business days, depending on product complexity and order volume. We provide reliable, rapid delivery for orders serving the industrial, medical, automotive, and aerospace sectors. Please submit your project details to receive an accurate delivery schedule.
- Are your optical glass products ISO, CE and RoHS certified?
All FELIX GLASS precision optical glass components comply with ISO quality system standards, as well as CE and RoHS requirements. We provide comprehensive test reports, material certificates, and inspection documentation for customer review. Please feel free to request full certification details and a formal quotation today.
- Do you offer one-stop custom optical glass processing services?
Yes. We provide a full range of in-house processing services, including CNC machining, precision grinding, optical polishing, vacuum coating (AR, AF, AG, IR), tempering, and screen printing. Every step—from raw material to finished product—is carried out within our own facility. Please let us know your requirements, and we will provide you with the most cost-effective solution.
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